Chemical Vapor Deposition of Zirconium Compounds: A Review
نویسندگان
چکیده
Coatings of zirconium compounds are used in a wide variety fields, yet an understanding and descriptions deposition mechanisms scant the public literature. The for metallic zirconium, ZrC, ZrN, ZrO2, ZrB2, silicides discussed based on direct vapor research those where possible or compared to complementary titanium systems when is lacking. Both inorganic organometallic discussed. As class compounds, can be significantly improved by investigations halides hydrogen situ analysis techniques such as Fourier-transform infrared (FTIR) spectroscopy x-ray photoelectron (XPS).
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ژورنال
عنوان ژورنال: Coatings
سال: 2023
ISSN: ['2079-6412']
DOI: https://doi.org/10.3390/coatings13020266